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所检缺陷种类：孔洞、尺寸、位置；穿孔；颗粒污染；凹坑；水印；划伤；浅坑；CMP凸起 
检测范围：8寸、12寸 
图像分辨率：1.725um/像素 
缺陷识别率：99% 
检测视野大小：4.5mm x 3.5mm 
最小可检孔洞缺陷大小：20um 
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